FE-SEM(전계방출형 주사전자현미경)
- 제조사 : Hitachi(SU8600)
- 스펙 :
Secondary Electron Resolution: 0.6㎚
Magnification: 20 to 200,000x
Acceleration voltage: 0.5 to 30㎸
Optional Accessories:
Energy Distributed X-ray Detector(EDS)
Mounted Sample Size Maximum Diameter: 150㎜